Identification of low-damping resonance characteristics and the high-bandwidth control of a piezo-positioning stage

LIU Haotian1, ZHANG Guilin1, ZHOU Kemin2

Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (18) : 287-296.

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PDF(2193 KB)
Journal of Vibration and Shock ›› 2024, Vol. 43 ›› Issue (18) : 287-296.

Identification of low-damping resonance characteristics and the high-bandwidth control of a piezo-positioning stage

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 43(18): 287-296

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