Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects

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Journal of Vibration and Shock ›› 2025, Vol. 44 ›› Issue (1) : 10-19.

VIBRATION THEORY AND INTERDISCIPLINARY RESEARCH

Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects

LI Baizhou1, HAN Jianxin*1,2, HUANG Yi1, CUI Liangyu1,2

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Abstract

Here, the nonlinear principal resonance problem of an electrostatically actuated micro-electromechanical system (MEMS)
oscillator considering fringing effects was qualitatively studied using nonlinear dynamics theory. Firstly, the spatial discretization with differential quadrature method was adopted to obtain the system’s single degree of freedom dynamic equation. Secondly, static bifurcation characteristics of the system were studied using bifurcation theory, and dimensionless critical cubic stiffness, primary pull-in voltage and secondary pull-in voltage were derived and defined. Thirdly, the multi-scale method was used to obtain the frequency response function of the system, and the dimensionless critical voltage for converting soft-hard characteristics of small amplitude vibration frequency response was defined. Finally, by combining dynamic pull-in conditions with the critical control equation for soft-hard conversion, dynamic laws of the system’s main resonance and inter-trap jumps were discussed. It was shown that this study has theoretical and engineering reference value for qualitatively grasping static and dynamic pull-in and main resonance response laws of electrostatically actuated MEMS oscillators.

Key words

micro-electromechanical / system (MEMS) oscillator nonlinear vibration / bifurcation / pull-in / fringing effect

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LI Baizhou1, HAN Jianxin1, 2, HUANG Yi1, CUI Liangyu1, 2. Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects[J]. Journal of Vibration and Shock, 2025, 44(1): 10-19

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