Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects

LI Baizhou1, HAN Jianxin1, 2, HUANG Yi1, CUI Liangyu1, 2

Journal of Vibration and Shock ›› 2025, Vol. 44 ›› Issue (1) : 10-19.

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Journal of Vibration and Shock ›› 2025, Vol. 44 ›› Issue (1) : 10-19.
VIBRATION THEORY AND INTERDISCIPLINARY RESEARCH

Qualitative study on nonlinear vibration of electrostatically actuated MEMS oscillator considering fringing effects

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 44(1): 10-19

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